000 00352nam a2200145Ia 4500
008 220105s9999 xx 000 0 und d
041 _aENGLISH
082 _a621.381
100 _a"LYSHEVSKI, SEROEY EDWARD"
245 0 _aMEMS AND NEMS : SYSTEMS DEVICES AND STRUCTURES
250 _n1
260 _bCRC PRESS
365 _b995.00
942 _cSCBB
999 _c210837
_d210837