000 00333nam a2200145Ia 4500
008 220105s9999 xx 000 0 und d
041 _aENGLISH
082 _a621.381
100 _a"Rebeiz, Gabrie M."
245 0 _aRf Mems Theory Design and Technology
250 _n1
260 _bWiley India
365 _b1159
942 _cBK
999 _c206520
_d206520