000			00346nam a2200145Ia 4500
008			220105s9999 xx 000 0 und d
041			_aENGLISH
082			_a621.381
100			_a"Lyshevski, Seroey Eward"
245		0	_aMems and Nems : Systems Devices and Structures
250			_n1
260			_bCrc Press
365			_b850
942			_cBK
999			_c206444 _d206444