000 00305nam a2200121Ia 4500
008 211126s9999 xx 000 0 und d
082 _a621.38173
100 _aSORAB K.GHANDHI
245 0 _aVLSI FABRICATION PRINCIPLES SILICON AND GALLIUM
260 _bJOHN WILEY
365 _b779.00
942 _cBTECH
999 _c137200
_d137200